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Elongation
such as increase of wafer breakage or reduction solar cell efficiency
A request for information and the corresponding data transmission is an example of such an activity
SEMI E76-0998 (first published)
and measurement techniques are described in this Standard
P03600 - SEMI P36 - Guide for Magnification Reference for Critical Dimension Measurement Scanning Electron Microscopes (CD-SEM) Revision:SEMI P36-0308 - Superseded ElongationThe purpose of this Guide is (1) to define common and important specifications of magnification references which are used for calibrating magnifications of critical dimension measurement scanning electron microscopes (CD SEMs), and as the result (2) to provide magnification references which are easy for anyone to use. It is preferable that design, manufacture and purchase specifications for CD SEM magnification references conform to this Guide.
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