MS01100 - SEMI MS11 - Specification for Microfluidic Port and Pitch Dimensions Revision:SEMI MS11-0318 - Superseded The scope of this Document

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MS01100 - SEMI MS11 - Specification for Microfluidic Port and Pitch Dimensions Revision:SEMI MS11-0318 - Superseded The scope of this Document1 Purpose 1. 1 This Specification provides the standard pitch dimensions for developers of microfluidic devices. 2 Scope 2. 1 This Specification is limited to providing a specific set of values for pitch in a microfluidic interface design, and port size, that ensure that two mating components fit properly. Referenced SEMI Standards (purchase separately) None. Revision History SEMI MS11 0318 (Reapproved 0525) SEMI MS11 0318 (first published)