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D05400 - SEMI D54 - Specification for Substrate Management of FPD Production (SMS-FPD) StdTpc-Automated Material Handling Systems It covers terminologies related to

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Description

It covers terminologies related to Polarizing Films of FPD manufacturing

1 mm thick (max) in a flat panel display (FPD) manufacturing facility

org in July 2008

SEMI D22-1103 (complete rewrite)

Alternative methods may also be used as long as they comply with SEMI C1 requirements for method validation

D05400 - SEMI D54 - Specification for Substrate Management of FPD Production (SMS-FPD) StdTpc-Automated Material Handling Systems It covers terminologies related toThis standard was technically approved by the global Flat Panel Display Factory Automation Committee. This edition was approved for publication by the global Audits & Reviews Subcommittee on May 13, 2009. It was available at www. semi. org in June 2009. E This standard was editorially modified in October 2009 to correct editorial errors. Changes were made to 7. 3. 4. 2, 10. 2. 3. 4, 10. 2. 3. 5, and 10. 2. 3. 6. At the production line of FPD, an

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