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3-0698 (Reapproved 0721)
exceptions
Short-Term Reproducibility
SEMI C21-0708 (technical revision)
SEMI E164-0313 (technical revision)
E06800 - SEMI E68 - Test Method for Determining Warm-Up Time of Mass Flow Controllers StdPbc-1225 3-0698 (Reapproved 0721)NOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been met. Inactive Standards or Safety Guidelines are available from SEMI and continue to be valid for use. The purpose of this method is to provide a standardized method for quantifying the warm up time of a mass flow controller (MFC). The test conditions in this method are intended to simulate bench top warm up, with an MFC
