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The model consists of equipment characteristics and behavior that are to be implemented in addition to the SEMI E30 fundamental requirements and additional capabilities
intermediate-level overview on how to use and read various measurement tools commonly used during inspection
and for equipment
SEMI E47 — Specification for 150 mm/200 mm Pod Handles
SEMI E58 ¾ Automated Reliability
E19400 - SEMI E194 - Guide to Using a Liquid Particle Counter to Assess Particulate Surface Contamination on Critical Chamber Components and Coupons Revision:SEMI E194-0725 - Current The model consists of equipment1 Purpose 1. 1 This Guide describes analytical methods for determining the extractable surface particles from a critical chamber component (CCC) or a coupon by using ultrasonic aided, deionized water (DIW) extraction followed by using a liquid particle counter (LPC). 1. 2 This Guide is intended to promote communication among the relevant parties (e. g., processing equipment users, processing equipment manufacturers, CCC manufacturers, cleaning service
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