C00323 - SEMI C3.23 - Standard for Oxygen (O2), 99.98% Quality Revision:SEMI C3.23-1000 (Withdrawn 1104) - Withdrawn Please make sure that you

Please make sure that you have reviewed your order prior to finalizing your purchase

1 mm thick (max) in a flat panel display (FPD) manufacturing facility

This Guide define acceptable CMP criteria of TSV in terms of dishing

replaced by SEMI C70

1 mmがすべての基板に適応する。

C00323 - SEMI C3.23 - Standard for Oxygen (O2), 99.98% Quality Revision:SEMI C3.23-1000 (Withdrawn 1104) - Withdrawn Please make sure that youThis Standard was technically approved by the Gases Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on July 11, 2004. Available at www. semi. org in November 2004; originally published in 1984; previously published in 1995. NOTICE: This Document was balloted and approved for withdrawal in 2004. Oxygen is a colorless, odorless, and oxidizing gas. It supports combustion. Referenced SEMI