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SEMI E40 — Standard for Processing Management
The ‘response to an upset’ situation
Hydrogen chloride is heavier than air and fumes strongly in moist air
an asphyxiant gas
and Services
C00319 - SEMI C3.19 - Standard for Hydrogen (H2), 99.9995% Quality Revision:SEMI C3.19-0200 - Replaced SEMI E40 — Standard forNOTICE: This document was replaced by SEMI C58 in 2005. Recognizing the importance of impurity content of gases in the manufacture of semiconductors, suppliers responded by introducing products with improved analytical characterization, notably for trace impurities. Products which meet all of the requirements may be described as "meeting SEMI specifications." Where an analytical procedure different from that provided is substituted by a supplier or
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