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SEMI E79-0304 (technical revision)
Automated test systems
The test method applies to homoepitaxial wafers on GaN bulk substrates as well as to heteroepitaxial wafers on substrates such as sapphire
1-1296 (technical revision)
SEMI E68-0997 (Reapproved 0309)
SEMI113 Biohybrid Sensing Systems for Volatile Organic Compounds StdPbc-0123 SEMI E79-0304 (technical revision)The Department of Defense needs non linear advances in the gas phase sensing to identify chemical threats, toxic industrial compounds, and physiologic changes present in human breath. Currently, fieldable instruments for gas analysis are large (>0. 5 cubic ft.), expensive (>$50,000), and slow. Hand held devices are limited to the identification of specific targets such as nitrogen oxide, oxygen, and carbon dioxide or generalized estimated
