E03200 - SEMI E32 - 材料搬送管理スタンダード（MMM） Revision:SEMI E32-0997 - Inactive 2 This Test Method is

2  This Test Method is applicable to wafers 50 mm or larger in diameter

·    AC contactor coils and AC relay coils

The measurement requires the fabrication of a guard-ring MOS capacitor (refer to Figure 1)

propylene-glycol-mono-methyl-ether-acetate (PGMEA) and the mixture 70wt% PGME/30wt% PGMEA for which a need has been identified

12-0698 (Reapproved 0706)

E03200 - SEMI E32 - 材料搬送管理スタンダード（MMM） Revision:SEMI E32-0997 - Inactive 2 This Test Method isNOTICE: This translation is a REFERENCE COPY ONLY. If differences should exist between the English version and a translation in any other language, the English version is the official and authoritative version. SEMI SEMI NOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been met. Inactive Standards or Safety Guidelines are available from SEMI and continue to be valid for use.