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SEMI C27-0918 (technical revision)
and phosphoric etchants
This can be shared among users and suppliers of semiconductor manufacturing equipment
polyvinyl chloride (PVC)
CCFLのサプライヤとユーザによって使用され，製品や開発品の品質の判定に用いられるものとする。
C00602 - SEMI C6.2 - Particle Specification for Grade 20/0.02 Oxygen Delivered as Pipeline Gas StdPbc-0318 SEMI C27-0918 (technical revision)This Standard was technically approved by the Gases Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on September 12, 2011. Available at www. semiviews. org and www. semi. org in November 2011; originally published in 1993; previously published November 2002. NOTICE: This Document is no longer supported by the global technical committee. It has been replaced by SEMI C97. The purposes
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