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E17100 - SEMI E171 - Specification for Predictive Carrier Logistics (PCL) Revision:SEMI E171-0916 - Superseded The purpose of this Standard

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Description

The purpose of this Standard is to provide a communication method which observes and/or controls every single wafer (including its related information) on equipment individually (and independently rather than a member of a lot) through single management point from the host

The Standard also provides definitions of what the equivalent of equipment-based training should be

セキュリティ対策は,個々の装置ユーザの半導体製造ラインの管理計画に合わせて仕立てられる。しかしながら,顧客毎の違いがあるので,個々の装置のユーザとサプライヤの間で装置情報システムのためのセキュリティポリシーの交渉は非効率的である。さらに,そこで取り決められたことが確実に機能し,持続性を持つかどうかは不透明である。半導体製造装置における情報セキュリティのためのガイドラインが必要とされる。

3  This Guide is complementary to existing SEMI Test Methods for measuring these parameters on single wafers

SEMI C28-0704 (technical revision)

E17100 - SEMI E171 - Specification for Predictive Carrier Logistics (PCL) Revision:SEMI E171-0916 - Superseded The purpose of this StandardThe purpose of this Standard is to provide a communication scheme for exchanges of carrier logistics related information, especially predictive information, between equipment and the factory system in order to support seamless cascading of carriers for continuous processing of equipment in semiconductor fabrication systems or similar ones. The purpose of this Standard is to provide models which represent carrier logistics management status in

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