E10000 - SEMI E100 - 6インチまたは230 mmのレチクルの搬送および保管に用いられるレチクルSMIFポッド（RSP）の仕様 StdPbc-1113 This Standard also provides a

This Standard also provides a guide for a grade of nitric acid for which a need has been identified

SEMI M21 — Specification for Assigning Addresses to Rectangular Elements in a Cartesian Array

This Guide defines a grid pattern that is useful for quantifying surface defects on a nominally circular semiconductor wafer

bumps or waves on the wafer surface that vary in peak to valley height from a few nanometers to a several hundred nanometers

SEMI M38-0312 (Reapproved 0718)

E10000 - SEMI E100 - 6インチまたは230 mmのレチクルの搬送および保管に用いられるレチクルSMIFポッド（RSP）の仕様 StdPbc-1113 This Standard also provides aGlobal Physical Interfaces and Carriers Committee2010430Global Audits and Reviews Subcommittee20106www. semi. org20002200411 IC6230 mmSMIF PODRSP Referenced SEMI Standards SEMI E1. 9 Mechanical Specification for Cassettes Used to Transport and Store 300 mm Wafers SEMI E19. 4 200 mm Standard Mechanical Interface (SMIF) SEMI E30. 1 Inspection and Review Specific Equipment Model (ISEM) SEMI E47. 1 Mechanical Specification for FOUPS Used to Transport and