C00603 - SEMI C6.3 - パイプラインガスとして授受されるグレード20/0.2水素（H2）に対するパーティクル仕様 Revision:SEMI C6.3-89 (Reapproved 1111) - Replaced SEMI C2 — Specifications for

SEMI C2 — Specifications for Etchants

By doing a separate analysis

SEMI 3D12 — Guide for Measuring Flatness and Shape of Low Stiffness Wafers

製造装置上のトランスファポイント（受け渡しポジション）のオブジェクト定義

nonflammable

C00603 - SEMI C6.3 - パイプラインガスとして授受されるグレード20/0.2水素（H2）に対するパーティクル仕様 Revision:SEMI C6.3-89 (Reapproved 1111) - Replaced SEMI C2 — Specifications forNOTICE: This translation is a REFERENCE COPY ONLY. If differences should exist between the English version and a translation in any other language, the English version is the official and authoritative version. SEMI SEMI Gases Global Technical Committee2011912global Audits and Reviews Subcommittee201111www. semiviews. org www. semi. org198920033 NOTICE: This Document is no longer supported by the global technical committee. It has been replaced by