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orgで入手可能となる。初版は1998年発行，前版は2009年11月に発行された。
This edition was approved for publication by the global Audits and Reviews Subcommittee on August 17
previously published October 2011
an automation evolution is underway
SEMI C36-1213 (technical revision)
C00354 - SEMI C3.54 - Gas Purity Guideline for Silane (SiH4) StdPbc-0519 orgで入手可能となる。初版は1998年発行，前版は2009年11月に発行された。This Standard was technically approved by the global Gases Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on September 12, 2011. Available at www. semiviews. org and www. semi. org in October 2011; originally published in 1997; previously published September 2006. NOTICE: This Document was balloted and approved for withdrawal in 2011. Silane is a pyrophoric, flammable colorless gas.
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