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NOTICE: This Document was completely rewritten in 2016
02 Ω·cm at 23°C and the resistivity of the layer must be greater than 0
The standard is limited to modules which accommodate wafer sizes from 100 mm up to and including 200 mm in diameter
microelectromechanical systems/nanoelectromechanical systems [MEMS/NEMS])
all documents cited shall be the latest published versions
S00700 - SEMI S7 - 評価要員および評価会社の資質に関する安全ガイドライン Revision:SEMI S7-0310 - Superseded NOTICE: This Document was completelyNotice: This translation is a REFERENCE COPY ONLY. If differences should exist between the English version and a translation in any other language, the English version is the official and authoritative version. SEMI SEMI Environmental Health & Safety Global Technical Committee201515global Audits and Reviews Subcommittee20155www. semi. org199420103 SEMIS SEMIS SEMIS Referenced SEMI Standards SEMI S2 Environmental, Health, and Safety Guideline for
