F11700 - SEMI F117 - Specification for Dimensions of Sandwich Components for 1.125 Inch Type Surface Mount Gas Distribution Systems Revision:SEMI F117-1121 - Current SEMI E121-0703 (technical revision)

SEMI E121-0703 (technical revision)

SEMI E70 — Guide for Tool Accommodation Process

For certain applications or specific chemicals

本仕様は，SEMIによって規定され，ウェーハの搬入，搬出がキャリアユニットによって実行される装置内でアクセスされるウェーハIDを読み出すことを目的とする。

SEMI MF1366-0308 (Reapproved 0413)

F11700 - SEMI F117 - Specification for Dimensions of Sandwich Components for 1.125 Inch Type Surface Mount Gas Distribution Systems Revision:SEMI F117-1121 - Current SEMI E121-0703 (technical revision)NOTICE: This Document replaces SEMI C88 0815. This Standard establishes the physical dimensions of filters, check valves, restrictors, port converters and other components for 1. 125 inch type surface mount gas distribution systems. This Standard applies to components that are installed in between a substrate and a component in a sandwich or stacked manner. This Standard establishes standard dimensions to provide interchangeability for components of