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The material is single crystal c-plane gallium nitride (GaN)
current/voltage
Polymer materials and components that meet the requirements specified in this Standard shall be considered suitable for UPW and LCDS as described in ¶ 1
SEMI E42 — Recipe Management Standard: Concepts
flammable colorless gas
C00347 - SEMI C3.47 - 臭化水素（HBr），品質99.98%の仕様 Revision:SEMI C3.47-1011 - Superseded The material is single crystalglobal Gases Committee2011912global Audits and Reviews Subcommittee201110www. semiviews. org www. semi. org1993200111 HBr Referenced SEMI Standards None.
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