C00326 - SEMI C3.26 - Specification for Tungsten Hexafluoride (WF6) in Cylinders, 99.8% Quality StdTpc-Process Chemicals - Miscellaneous originally published in 1983

originally published in 1983

本スタンダードでは，FPDカラーフィルタに使用される高抵抗樹脂ブラックマトリクス（BM）の指定された特性を測定するための実施要領を確立するものとする。これらの方法は，製造，品質管理，および開発業務に応用することができる。

本スタンダードは，フラットパネルディスプレイの製造に使用されるガラス基板の所定の幾何学的要求事項を規定する。

The method of membrane treatment prior to the test for decreasing the adsorbing effect

org in June 2008

C00326 - SEMI C3.26 - Specification for Tungsten Hexafluoride (WF6) in Cylinders, 99.8% Quality StdTpc-Process Chemicals - Miscellaneous originally published in 1983NOTICE: This Document was balloted and approved for withdrawal in 2011. It was replaced by SEMI C70. Tungsten hexafluoride is a colorless gas or colorless liquid. It is shipped as a liquefied gas under its own vapor pressure. Referenced SEMI Standards (purchase separately) None. Revision History SEMI C3. 26 0301 (Withdrawn 0312, replaced by SEMI C70) SEMI C3. 26 0301 (technical revision) SEMI C3. 26 94 (technical revision) SEMI C3. 26 93 (technical