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· Automated test equipment
5 µmまたはそれ以下（0
SEMI F40-0699 (first published)
SEMI A1-0123 (technical revision)
It was developed for use with silicon wafers of 150 mm diameter or less with standard diameter and fiducial positions as given in SEMI M1
M06100 - SEMI M61 - 埋め込み層付きシリコンエピタキシャルウェーハの仕様 StdTpc-Terminology · Automated test equipmentglobal Silicon Wafer Technical Committee2012221global Audits and Reviews Subcommittee20126www. semiviews. org www. semi. org20057 SEMI M1SEMI M2 Referenced SEMI Standards SEMI M1 Specifications for Polished Single Crystal Silicon Wafers SEMI M2 Specifications for Silicon Epitaxial Wafers for Discrete Device Applications SEMI M20 Practice for Establishing a Wafer Coordinate System SEMI M59 Terminology for Silicon Technology SEMI MF26 Test Methods for
