F02600 - SEMI F26 - Specification for Particle Concentration of Grade 10/0.2 Toxic Specialty Gases Revision:SEMI F26-0697 (Reapproved 0303) - Superseded This Specification may be applied

This Specification may be applied to manufacturing process

This Document uses a pin grid (cavity down) package as one example of the type of packaging element that can be measured with the method described herein

This edition was approved for publication by the global Audits and Reviews Subcommittee on February 1

NOTICE: This Standard was balloted and approved for withdrawal in 2021

Originally published June 1999

F02600 - SEMI F26 - Specification for Particle Concentration of Grade 10/0.2 Toxic Specialty Gases Revision:SEMI F26-0697 (Reapproved 0303) - Superseded This Specification may be appliedThis Standard was technically approved by the Gases Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on June 18, 2012. Available at www. semiviews. org and www. semi. org in January 2018; originally published June 1997; previously published July 2012. The purpose of this Document is to set a maximum permissible particle concentration for 10 0. 2 grade toxic specialty gases and to