Magnetrons, reactive gases and sputtering Diederik Depla:Hardcover ¥ Blank cover allows for

¥ Blank cover allows for private storage so no one knows it's your journal

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Magnetrons, reactive gases and sputtering Diederik Depla:Hardcover ¥ Blank cover allows forThis handbook covers the fundamental aspects of reactive magnetron sputter deposition. This physical vapor deposition technique is used to grow compound thin films. The books starts with an explanation of the four title words. Using a simple model several aspects of the deposition technique are introduced. In the following chapters the book introduces a more complete mode to address some specific features of reactive sputter deposition. Some important