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SEMI E159 — Mechanical Specification for Multi Application Carrier (MAC) Used to Transport and Ship 450 mm Wafers
PSL particle number concentration
TSV開口を含んだ構造の製造および検査作業の定義や管理に重要な測定量に焦点を当てている。
covered by native oxide
SEMI M12-0706 (technical revision)
M08000 - SEMI M80 - Specification for Front-Opening Shipping Box Used to Transport and Ship 450 mm Wafers StdPbc-1020 SEMI E159 — Mechanical SpecificationNOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been met. Inactive Standards or Safety Guidelines are available from SEMI and continue to be valid for use. This Standard specifies the front opening shipping box (FOSB) used to ship 450 mm wafers from wafer suppliers to their customers (typically IC manufacturers), while maintaining wafer quality. This Standard is intended to
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