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This document covers requirements for dichlorosilane (SiH2Cl2) used in the semiconductor industry
if not all
Customary units are in parentheses for reference purposes only and have been rounded to the nearest whole value
SEMI C31-0301 (technical revision)
the uniformity of the bonding process
C00324 - SEMI C3.24 - Specification for Sulfur Hexafluoride (SF6) in Cylinders, 99.97% Quality StdPbc-0924 This document covers requirements forThe purpose of this Document is to provide specifications for sulfur hexafluoride (SF6) that is used in the semiconductor industry. This Document covers requirements for sulfur hexafluoride used in the semiconductor industry. Referenced SEMI Standards SEMI C3 Specification for Gases
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