T01500 - SEMI T15 - Specification for Jig ID: Concept StdTpc-Silicon Materials & Process Control Optical measurement methods are widely

Optical measurement methods are widely used to evaluate flatness of substrate

as well as accessories internal to wet equipment (e

SEMI E109-0701 (first published)

originally published in 1991

and Unit which are considered common components

T01500 - SEMI T15 - Specification for Jig ID: Concept StdTpc-Silicon Materials & Process Control Optical measurement methods are widelyThe purpose of this Standard is to establish generic Jig ID to identify individual jigs uniquely, mounted on the jig to process semiconductor devices. This Standard specifies the following contents of IDs to be installed onto the jigs used in the process of semiconductor manufacturing. Types of IDs Data format Referenced SEMI Standards (purchase separately) SEMI T12 Specification of Tracing Jigs and Implements Revision History SEMI T15 0818