C00331 - SEMI C3.31 - Specification for Dichlorosilane (SiH2Cl2) in Cylinders, 99% Quality (Provisional) Revision:SEMI C3.31-1102 - Replaced 6-0421 (technical revision)

6-0421 (technical revision)

This edition was approved for publication by the global Audits and Reviews Subcommittee on April 15

" Where an analytical procedure different from that provided is substituted by a supplier or user

3  This Guide is complementary to existing SEMI Test Methods for measuring these parameters on single wafers

It is the responsibility of the users of the Documents to establish appropriate safety and health practices

C00331 - SEMI C3.31 - Specification for Dichlorosilane (SiH2Cl2) in Cylinders, 99% Quality (Provisional) Revision:SEMI C3.31-1102 - Replaced 6-0421 (technical revision)NOTICE: This document was replaced by SEMI C56 in 2005. This specification was technically approved by the Global Gases Committee and is the direct responsibility of the North American Gases Committee. Current edition approved by the North American Regional Standards Committee on August 29, 2002. Initially available at www. semi. org September 2002; to be published November 2002. Originally published in 1986; previously published in 1994. The purpose