E01501 - SEMI E15.1 - 300 mm装置ロードポートのための仕様 StdPbc-0220 The unique identifier will enable

The unique identifier will enable the ability to send manufacturing data back and forward through the supply chain to perform data analysis

SEMI D6-0308 (technical revision)

E　本文書は2007年9月に，誤字を訂正するため，編集上の修正がなされた。変更箇所は，§6である。

• extract the edge profile characteristic parameters by fitting lines or arcs to portions of the measured edge profile at defined distances from the periphery of the wafer and compare them with the specified values

SEMI D32 only specifies one Bare Glass ID position

E01501 - SEMI E15.1 - 300 mm装置ロードポートのための仕様 StdPbc-0220 The unique identifier will enablePhysical Interfaces & Carriers Global Technical Committee2010827global Audits and Reviews Subcommittee201010 www. semi. org199620053 NOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been met. Inactive Standards or Safety Guidelines are available from SEMI and continue to be valid for use. 300 mm 300 mm200 mmSEMI E15 Referenced SEMI Standards SEMI E1. 9 Mechanical Specification