E16600 - SEMI E166 - Specification for 450 mm Cluster Module Interface: Mechanical Interface and Transport Standard Revision:SEMI E166-0814 - Superseded This Standard was technically approved

This Standard was technically approved by the Flat Panel Display – Factory Automation Global Technical Committee

and geometric specification measurements

The procedure involves detection and measurement of the surface elemental composition by Auger electron spectroscopy (AES)

SEMI E49 — Guide for High Purity and Ultrahigh Purity Piping Performance Subassemblies

SEMI E53 — Event Reporting

E16600 - SEMI E166 - Specification for 450 mm Cluster Module Interface: Mechanical Interface and Transport Standard Revision:SEMI E166-0814 - Superseded This Standard was technically approvedThe purpose of this Standard is to ensure minimum necessary level of physical connectivity between the transport module and process modules comprising the cluster tool for 450 mm. It is expected that a process module can be connected to the transport module of any cluster tool with least design change provided that both modules meet the requirement of this Standard. Process modules accept wafers at locations that may vary substantially from one module