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E14700 - SEMI E147 - Guide for Equipment Data Acquisition (EDA) Revision:SEMI E147-0307E - Inactive Flow Curve

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Description

Flow Curve

The purpose of this Test Method is to specify a method to measure the concentration of the deep donor EL2 in SI GaAs by infrared absorption

NOTICE: Paragraphs entitled NOTE are not an official part of this Document and are not intended to modify or supersede it

for which Instrumental Neutron Activation Analysis (INAA) is one method of choice

SEMI G42 — Specification for Thermal Test Board Standardization for Measuring Junction-to-Ambient Thermal Resistance of Semiconductor Packages

E14700 - SEMI E147 - Guide for Equipment Data Acquisition (EDA) Revision:SEMI E147-0307E - Inactive Flow CurveThis standard was technically approved by the global Information & Control Committee. This edition was approved for publication by the global Audits & Reviews Subcommittee on November 21, 2006. It was available at www. semi. org in February 2007. E This standard was editorially modified in September 2007 to remove duplicate sections. Changes were made to 6. This guide document provides additional information about the Equipment Data Acquisition (EDA)

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