E15900 - SEMI E159 - ウェーハの搬送及び，輸送のための多目的キャリア(MAC：Multi Application Carrier)の機械仕様 StdTpc-Stainless Steel Components and equipment design and process

and equipment design and process improvements

SEMI M53 — Practice for Calibrating Scanning Surface Inspection Systems Using Certified Depositions of Polystyrene Latex Spheres on Unpatterned Semiconductor Wafer Surfaces

5  This Safety Guideline provides industry-specific criteria

SEMI E136-1104 (Reapproved 0512)

it should be possible to reproduce measurements at different sites

E15900 - SEMI E159 - ウェーハの搬送及び，輸送のための多目的キャリア(MAC：Multi Application Carrier)の機械仕様 StdTpc-Stainless Steel Components and equipment design and processSEMI SEMI Physical Interfaces & Carriers Global Technical Committee20131223global Audits and Reviews Subcommittee20116www. semiviews. org www. semi. org2011620129 SEMI M74450 mm 450 MACMACFOUPFOUPMAC 450mm 450mm 450 mmKCP 3 Referenced SEMI Standards SEMI E1. 9 Mechanical Specification for Cassettes Used to Transport and Store 300 mm Wafers SEMI E30. 1 Inspection and Review Specific Equipment Model (ISEM) SEMI E144 Provisional Specification for RF Air