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本測定方法は，
E This document was editorially modified in October 2000 to correct a formatting error
4 This Standard can be applied to all through and blind vias as they occur in any flat surfaces made of glass
本仕様は
Alternative methods can be used as long as method validation per SEMI C1 has been demonstrated
C00354 - SEMI C3.54 - シラン（SiH4）のガス純度ガイドライン Revision:SEMI C3.54-0200E (Withdrawn 1011) - Withdrawn 本測定方法は，global Gases Technical Committee2011912global Audits and Reviews Subcommittee201110www. semiviews. org www. semi. org199720069 : 2011 Referenced SEMI Standards None.
