M02600 - SEMI M26 - Guide for the Re-Use of 100, 125, 150, and 200 mm Wafer Shipping Boxes Used to Transport Wafers Revision:SEMI M26-0304 (Reapproved 1110) - Inactive the supplier and the purchaser

the supplier and the purchaser must agree fully on the experimental conditions used

This specification was technically approved by the Global Liquid Chemicals Committee

• Argon (Ar)

judgment rules

or polished condition and for monitoring thermal and mechanical effects on the warp of silicon wafers during device processing

M02600 - SEMI M26 - Guide for the Re-Use of 100, 125, 150, and 200 mm Wafer Shipping Boxes Used to Transport Wafers Revision:SEMI M26-0304 (Reapproved 1110) - Inactive the supplier and the purchaserThis guide was technically approved by the global Silicon Wafer Committee and is the direct responsibility of the Japanese Silicon Wafer Committee. Current edition approved by the Japanese Regional Standards Committee on January 9, 2004. Initially available at www. semi. org February 2004; to be March 2004. Originally published in 1995; last published in 1996. This document is a guide for box cleaning services, wafer suppliers, and wafer users for the