C00356 - SEMI C3.56 - ジボラン混合ガスの仕様 Revision:SEMI C3.56-0312 - Superseded 1-0301 (first published)

Name: C00356 - SEMI C3.56 - ジボラン混合ガスの仕様 Revision:SEMI C3.56-0312 - Superseded 1-0301 (first published)
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SKU: 98296504987

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Description

1-0301 (first published)

transportation vibration

Components and Construction (§ 10)

SEMI E39-1101 (technical revision)

재료가 다른 재료를 담는 경우 (웨이퍼를 담는 캐리어와 같은)

C00356 - SEMI C3.56 - ジボラン混合ガスの仕様 Revision:SEMI C3.56-0312 - Superseded 1-0301 (first published)global Gases Technical Committee20111224global Audits and Reviews Subcommittee20123www. semiviews. org www. semi. org20006 N2H2ArHeSiH4 1 SEMI H2N2O2 Referenced SEMI Standards None.

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