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binary Data Matrix symbology for front-surface marking of metal lead-frame strips (also called ‘strips’)
but the test method has a useful precision especially when the oxygen content is much greater (approximately 10× to 20×) than the measured oxygen background in the float zone silicon
• type of PSL (reference material)
SEMI E35-95 (first published)
and interoperability
E13400 - SEMI E134 - データ収集管理の仕様 StdPbc-1115 binary Data Matrix symbology forglobal Information & Control Committee2010430global Audits and Reviews Subcommittee20106www. semi. org2004720103 Subordinate Document: SEMI E134. 1 0710 DCMSOAP Referenced SEMI Standards SEMI E30 Generic Model for Communications and Control of Manufacturing Equipment (GEM) SEMI E40 Standard for Processing Management SEMI E94 Specification for Control Job Management SEMI E120. 1 XML Schema for the Common Equipment Model SEMI E121 Guide for Style &
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