E06200 - SEMI E62 - 300 mmフロントオープニング・メカニカルインタフェース（FIMS）の仕様 Revision:SEMI E62-1106 - Superseded It is not intended for

It is not intended for dark-field illumination

This Standard specifies limits on the footprint

orgで入手可能となる。初版は2000年2月発行，前版は2004年11月発行。

SEMI G10-96 (technical revision)

5  The values stated in SI units are to be regarded as the standard

E06200 - SEMI E62 - 300 mmフロントオープニング・メカニカルインタフェース（FIMS）の仕様 Revision:SEMI E62-1106 - Superseded It is not intended forglobal Physical Interfaces & Carriers Technical Committee20111224global Audits and Reviews Subcommittee20125www. semiviews. org www. semi. org1997200611 : Referenced SEMI Standards SEMI E1. 9 Mechanical Specification for Cassettes Used to Transport and Store 300 mm Wafers SEMI E15 Specification for Tool Load Port SEMI E19 Standard Mechanical Interface (SMIF) SEMI E47. 1 Mechanical Specification for Boxes and Pods Used to Transport and Store 300mm