C05300 - SEMI C53 - Specifications for Dimethyl Sulfoxide (DMSO) [Grades 1 and 2] StdDcs-Current Due to the migration to

Due to the migration to large substrate sizes in FPD production

それぞれの方法は，管理された連続化学反応の間に基板より除去された材料の合計の量を，提供する。それぞれの方法に対し，この結果は名目上同一である。

orgで入手可能となる。初版は2006年7月出版。

Each method provides a measure of the amount of material that is removed from a substrate during a controlled chemical reaction sequence

org in June 2009

C05300 - SEMI C53 - Specifications for Dimethyl Sulfoxide (DMSO) [Grades 1 and 2] StdDcs-Current Due to the migration toNOTICE: This Document was reapproved with minor editorial changes. The purpose of this Document is to standardize requirements for dimethyl sulfoxide used in the semiconductor industry and testing procedures to support those standards. Test methods have been shown to give statistically valid results. Referenced SEMI Standards SEMI C1 Guide for the Analysis of Liquid Chemicals