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Use of this Specification ensures the consistency of all wafers marking performed by silicon manufacturers
and capacity
単位 － SI単位系を使用する。
Although this Specification does not specify the marking technique to be employed when complying with its requirements
When the liquid phase is exhausted
MF052300 - SEMI MF523 - Practice for Unaided Visual Inspection of Polished Silicon Wafer Surfaces Revision:SEMI MF523-1107 (Reapproved 1023) - Current Use of this Specification ensuresThis Practice covers an inspection procedure for determining the surface quality of silicon wafers that have been polished on one side. This Practice is intended as a large volume acceptance method and does not require use of a microscope or other optical instruments. The inspection relies heavily on the visual acuity of the operator; therefore, test results may be very operator sensitive. Defects visible to the unaided eye on polished wafer surfaces
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