D06500 - SEMI D65 - Test Method for Measurement for the Color Breakup of Field Sequential Color Display StdPbc-0222 This Guide supports the approach

This Guide supports the approach by off-line measurement of the contaminants using best available techniques available in the laboratory setting

本スタンダードは，FPD用カラーフィルタの耐薬品性を評価するための試験方法を2つ規定する。一方は，定性的であり，もう一方は定量的なものである。

• Conventional recipe download modes such as Pre-Download Mode or Full Download Mode

The scope is limited to defining the key EQIPs and their linking to process program parameters

and automated test equipment

D06500 - SEMI D65 - Test Method for Measurement for the Color Breakup of Field Sequential Color Display StdPbc-0222 This Guide supports the approach1 Purpose 1. 1 Field sequential color technique in the flat panel display has become more and more important. The effect of color breakup (CBU) occurs in the panels in which the field sequential technique is used. There are still no adaptive measurement standards to quantify the quality of color breakup. To standardize the classification of color breakup for flat panel displays is necessary. 2 Scope 2. 1 This Standard is to design and implement the